Section XVI: Machinery and Mechanical Appliances; Electrical Equipment; Parts Thereof; Sound Recorders and Reproducers, Television Image and Sound Recorders and Reproducers, and Parts and Accessories of Such Articles
Chapter
Description
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8401 1000 00
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8401 4000 00
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-
-
8402 2000 00
-
8402 9000
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8402 9000 10
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-
-
-
8404 1000 10
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-
8404 2000 00
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-
-
8406 10
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8406 1010 00
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-
-
8406 81
-
8406 8110
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8406 8110 20
-
-
-
-
8406 8210
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8406 8210 10
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8406 8210 20
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-
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8406 8210 50
-
8406 8210 70
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-
-
-
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8406 90
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8406 9020 00
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8406 9040 00
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8406 9045
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8406 9045 40
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-
-
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8406 9050 00
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8406 9070 00
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-
-
-
-
8407 1000
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-
-
8407 1000 20
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8407 1000 40
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8407 1000 60
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-
-
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8407 2100
-
8407 2100 40
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8407 2900
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8407 2900 10
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8407 2900 20
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8407 2900 30
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8407 2900 40
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8407 3100 40
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8407 3220 40
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8407 3290
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8407 3290 40
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8407 3290 80
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8407 3310 30
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8407 3310 60
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8407 3330 40
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8407 3360
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8407 3360 40
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8407 3390
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8407 3390 40
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8407 3390 80
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8407 3405 30
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8407 3405 60
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8407 3414 00
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8407 3435 30
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8407 3435 60
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-
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8407 3444 00
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-
-
-
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8407 90
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-
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8407 9010 10
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8407 9010 60
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-
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8407 9090
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8407 9090 10
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-
8407 9090 20
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8407 9090 40
-
8407 9090 60
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8407 9090 80
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-
-
-
-
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8408 1000
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8408 1000 05
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8408 1000 15
-
8408 1000 20
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8408 1000 30
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8408 1000 40
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8408 1000 50
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-
-
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8408 2010 40
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8408 2010 80
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-
-
8408 90
-
-
8408 9010 40
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8408 9010 80
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-
8408 9090
-
8408 9090 10
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8408 9090 20
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8408 9090 30
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8408 9090 40
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8408 9090 50
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-
-
-
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8409 1000
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8409 1000 40
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-
-
-
-
8409 9110 60
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-
-
8409 9130 00
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8409 9150
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8409 9150 10
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8409 9150 81
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-
-
8409 9192
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8409 9192 10
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-
8409 9199
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8409 9199 10
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-
-
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8409 99
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8409 9910 60
-
-
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8409 9991 10
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-
8409 9992
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8409 9992 10
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-
8409 9999
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8409 9999 10
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-
-
-
-
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8410 1100 00
-
8410 1300 00
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8410 9000 00
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-
-
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8411 11
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8411 1140 00
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8411 12
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8411 1240 00
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-
-
-
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8411 2140 00
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8411 22
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8411 2240 00
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-
-
-
-
8411 8140 00
-
8411 8180
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-
8411 82
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8411 8240 00
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8411 8280
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-
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8411 91
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8411 9110 40
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8411 9110 60
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-
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8411 9190
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8411 9190 40
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-
8411 9190 81
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-
-
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8411 99
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8411 9910 10
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8411 9910 40
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-
-
8411 9990
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8411 9990 30
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-
8411 9990 81
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8411 9990 90
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-
-
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8412 1000
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8412 1000 10
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-
-
8412 2100
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8412 2100 15
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8412 2100 30
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8412 29
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8412 2940 00
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8412 2980
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8412 2980 30
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8412 2980 45
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-
-
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8412 3100
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8412 3100 40
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8412 3900
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8412 3900 40
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-
-
8412 80
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8412 8010 00
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-
8412 90
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8412 9010 00
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8412 9090
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-
8412 9090 05
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-
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8412 9090 25
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-
8412 9090 50
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-
8412 9090 75
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-
-
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8413
-
-
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8413 3090
-
8413 3090 30
-
8413 3090 60
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8413 4000 00
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-
8413 5000 10
-
8413 5000 50
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-
-
8413 5000 70
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-
-
-
8413 6000
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8413 6000 50
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8413 6000 70
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-
8413 70
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8413 7020
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8413 7020 04
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-
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8413 7020 05
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8413 7020 15
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-
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8413 7020 22
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8413 7020 25
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-
8413 7020 30
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8413 7020 40
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-
-
-
8413 8100
-
8413 8100 20
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-
8413 8200 00
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-
-
8413 91
-
8413 9190
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8413 9190 10
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-
8413 9190 55
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-
-
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8413 9200 00
-
-
-
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8414 1000 00
-
8414 2000 00
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-
8414 3040 00
-
8414 3080
-
-
8414 3080 10
-
8414 3080 20
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-
-
-
8414 3080 30
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-
8414 3080 80
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-
8414 3080 90
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-
-
-
-
-
8414 5130 00
-
8414 5190
-
8414 5190 60
-
-
-
8414 59
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8414 5910 00
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-
8414 5930 00
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8414 5965
-
8414 5965 40
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-
-
-
-
8414 7000 00
-
8414 80
-
-
8414 8005 00
-
8414 8016
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-
-
8414 8016 05
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8414 8016 15
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8414 8016 25
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8414 8016 35
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8414 8016 40
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8414 8016 45
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8414 8016 55
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-
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8414 8016 60
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8414 8016 65
-
8414 8016 70
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8414 8016 75
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-
-
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8414 8016 85
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-
-
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8414 8020
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8414 8020 05
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-
8414 8020 15
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8414 8020 55
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8414 8020 65
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8414 8020 75
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-
-
-
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8414 90
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-
8414 9010 40
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-
-
8414 9030 00
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8414 9041
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8414 9041 20
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-
-
-
8414 9041 45
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-
-
8414 9041 65
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8414 9041 80
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-
-
-
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8414 9091
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8414 9091 40
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-
-
-
-
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8415 1030
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8415 1030 40
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8415 1030 80
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-
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8415 2000 00
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-
-
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8415 8101 10
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8415 8101 20
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-
-
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8415 8201 05
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8415 8201 10
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-
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8415 8201 15
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8415 8201 20
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-
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8415 8201 30
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8415 8201 35
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-
-
-
8415 8300
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-
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8415 8300 50
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8415 8300 60
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-
-
-
-
8415 90
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8415 9040 00
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8415 9080
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8415 9080 25
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-
8415 9080 45
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8415 9080 65
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-
-
-
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8416 1000 00
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8416 2000 40
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-
-
8417
-
8417 2000 00
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8417 8000 00
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-
-
-
8418 1000 10
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-
-
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8418 1000 80
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-
-
-
-
8418 2100
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8418 2100 10
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8418 2100 90
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8418 29
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8418 2910 00
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-
-
-
8418 6901
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8418 6901 10
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8418 6901 20
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8418 6901 30
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8418 6901 40
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8418 6901 50
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8418 6901 60
-
8418 6901 80
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-
-
8418 99
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8418 9980
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8418 9980 05
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8418 9980 10
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8418 9980 15
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8418 9980 20
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8418 9980 25
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-
-
-
-
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8419 1100 00
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8419 1200 00
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8419 1901
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8419 1901 20
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-
-
-
8419 2000 10
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8419 2000 20
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-
-
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8419 3310 00
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8419 3400 00
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8419 3902
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8419 3902 70
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-
-
8419 4000
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8419 4000 40
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8419 50
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8419 5010 00
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-
-
-
-
8419 8150
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8419 8150 40
-
-
8419 8190
-
-
8419 89
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8419 8910 00
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-
8419 8960 00
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8419 8995
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-
8419 8995 20
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-
-
8419 8995 60
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8419 8995 80
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8419 8995 85
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-
-
-
-
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8419 90
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8419 9010 00
-
8419 9030 00
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-
8419 9050
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8419 9050 40
-
-
8419 9095
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-
-
-
-
-
8420 1010 00
-
8420 1090
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-
-
8420 91
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8420 9110 00
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-
8420 99
-
8420 9910 00
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-
-
-
-
-
8421 1100 00
-
8421 1200 00
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-
-
8421 2100 00
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8421 2300 00
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8421 2900
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8421 2900 05
-
-
8421 2900 15
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-
-
-
-
-
8421 3100 00
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8421 3901
-
-
-
-
8421 3901 20
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-
8421 3901 40
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-
-
-
-
-
8421 9901
-
-
-
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8422 1100 00
-
-
-
8422 3011 00
-
8422 3091
-
8422 3091 10
-
8422 3091 20
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-
-
-
8422 3091 30
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-
-
8422 3091 50
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-
-
-
8422 3091 80
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8422 3091 86
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8422 3091 87
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-
-
-
-
-
-
8422 4011 10
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-
8422 4091
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8422 4091 40
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8422 4091 60
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8422 4091 70
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-
-
8422 90
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-
8422 9006
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8422 9006 40
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-
8422 9011 00
-
8422 9091
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-
8422 9091 30
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8422 9091 60
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-
-
-
-
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8423 1000 10
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-
8423 1000 30
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-
-
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8423 2010 00
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-
-
-
-
8423 8100 10
-
8423 8100 20
-
8423 8100 30
-
-
-
-
8423 8200 10
-
-
8423 89
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8423 8910 00
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-
-
-
-
8424 1000 00
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-
8424 2010 00
-
-
-
8424 3010 00
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-
-
8424 41
-
-
-
8424 8200
-
-
8424 8200 10
-
-
-
-
8424 90
-
8424 9005 00
-
8424 9010 00
-
8424 9020 00
-
8424 9090
-
8424 9090 40
-
-
-
-
-
-
8425 1100 00
-
-
-
8425 3101 00
-
-
-
8425 4100 00
-
8425 4200 00
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-
-
-
-
8426 1100 00
-
8426 1200 00
-
-
8426 2000 00
-
8426 3000 00
-
-
8426 4100
-
8426 4100 05
-
-
8426 4100 10
-
-
-
8426 4900
-
8426 4900 10
-
-
-
-
8426 9100 00
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-
-
-
-
8427 1040 00
-
8427 1080
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-
-
8427 20
-
8427 2040 00
-
8427 2080
-
-
8427 9000
-
-
-
8428 2000
-
-
8428 3100 00
-
8428 3200 00
-
8428 3300 00
-
-
8428 4000 00
-
8428 7000 00
-
8428 9003
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-
-
8429 1100
-
8429 1100 90
-
8429 1900
-
8429 1900 90
-
-
8429 2000 00
-
8429 3000
-
-
8429 3000 20
-
8429 3000 40
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-
8429 3000 60
-
-
8429 4000
-
-
8429 51
-
8429 5110
-
-
-
8429 5110 05
-
-
8429 5110 15
-
8429 5110 25
-
8429 5110 30
-
8429 5110 35
-
8429 5110 40
-
8429 5110 45
-
8429 5110 50
-
8429 5110 55
-
-
-
-
8429 5110 65
-
-
8429 5150
-
-
8429 5150 10
-
8429 5150 20
-
8429 5150 30
-
8429 5150 40
-
8429 5150 50
-
-
8429 5150 60
-
-
-
-
8429 5250
-
8429 5250 90
-
8429 59
-
8429 5950
-
-
-
8429 5950 20
-
-
-
8429 5950 80
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-
-
-
-
8430 1000 00
-
8430 2000
-
-
8430 2000 30
-
-
-
-
8430 3100
-
8430 3100 40
-
-
8430 3900
-
8430 3900 40
-
-
-
-
8430 4100 00
-
8430 49
-
8430 4980
-
-
8430 50
-
8430 5010 00
-
-
-
8430 6100 00
-
-
-
-
8431 1000
-
8431 1000 10
-
-
8431 2000 00
-
-
-
8431 3100 20
-
8431 3100 40
-
-
8431 3900
-
8431 3900 10
-
-
8431 3900 50
-
-
-
-
-
8431 4100
-
8431 4100 20
-
8431 4100 40
-
8431 4100 60
-
-
8431 4200 00
-
-
8431 4380
-
-
8431 4380 20
-
8431 4380 40
-
-
8431 4380 90
-
-
8431 49
-
8431 4910
-
8431 4990
-
-
8431 4990 05
-
8431 4990 10
-
8431 4990 15
-
-
-
-
8431 4990 25
-
-
-
8431 4990 35
-
-
8431 4990 36
-
8431 4990 38
-
-
-
-
8431 4990 50
-
8431 4990 55
-
-
8431 4990 81
-
-
8431 4990 84
-
8431 4990 90
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-
-
-
-
-
-
-
-
8432 1000
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8432 1000 20
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8432 1000 40
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-
-
8432 2100 00
-
8432 2900
-
-
8432 2900 40
-
8432 2900 60
-
-
-
-
-
-
8432 3100 10
-
-
8432 3900
-
8432 3900 10
-
-
-
-
8432 4100 00
-
8432 4200 00
-
-
8432 8000
-
8432 8000 10
-
-
8432 9000
-
8432 9000 10
-
8432 9000 20
-
-
8432 9000 81
-
-
-
-
-
-
8433 1100 10
-
-
8433 1100 20
-
8433 1100 30
-
8433 1100 40
-
-
-
8433 1100 50
-
8433 1100 60
-
-
-
8433 1900
-
8433 1900 10
-
8433 1900 20
-
8433 1900 30
-
-
8433 1900 40
-
-
-
-
-
-
8433 2000 20
-
-
-
8433 3000 00
-
8433 4000 00
-
-
8433 5100
-
8433 5100 10
-
-
8433 5200 00
-
8433 5300 00
-
8433 5900
-
8433 5900 10
-
-
-
-
8433 6000 10
-
-
8433 90
-
-
8433 9010 10
-
-
8433 9050
-
-
8433 9050 10
-
8433 9050 25
-
-
8433 9050 60
-
-
-
-
-
8434 1000 00
-
8434 2000 00
-
-
-
8436 1000 00
-
-
8436 2100 00
-
-
8436 8000
-
8436 8000 20
-
-
8436 8000 40
-
8436 8000 60
-
-
8436 8000 70
-
-
-
-
-
-
8436 9100 40
-
-
8436 9900
-
8436 9900 20
-
8436 9900 30
-
8436 9900 35
-
-
8436 9900 40
-
-
-
-
-
-
8437 8000
-
8437 8000 10
-
-
8437 9000
-
8437 9000 10
-
-
-
8438 1000
-
8438 1000 10
-
-
8438 3000 00
-
8438 4000 00
-
-
8438 5000 10
-
-
8438 8000 00
-
8438 90
-
8438 9010 00
-
8438 9090
-
-
-
-
-
8439 1000 90
-
8439 2000
-
8439 2000 90
-
8439 3000 00
-
-
-
8439 9110 00
-
-
8439 99
-
8439 9910 00
-
8439 9950 00
-
-
-
-
-
8441 1000 00
-
8441 2000 00
-
8441 8000 00
-
-
-
8442 3001
-
8442 3001 10
-
8442 3001 50
-
-
-
-
-
-
8443 1110 00
-
-
8443 1300 00
-
8443 1600 00
-
8443 1700 00
-
8443 19
-
8443 1920 00
-
-
-
-
-
8443 3210
-
-
8443 3210 10
-
-
8443 3210 30
-
8443 3210 50
-
8443 3210 60
-
8443 3210 70
-
8443 3210 80
-
-
-
8443 39
-
-
-
8443 3930 00
-
8443 3940 00
-
-
8443 3950 00
-
-
-
-
8443 9110 00
-
8443 9120 00
-
-
8443 99
-
-
8443 9920
-
8443 9920 10
-
-
8443 9925
-
8443 9925 10
-
-
-
-
8443 9950
-
-
8443 9950 11
-
-
-
-
-
-
8444 0000 10
-
-
-
-
8445 1100 00
-
8445 1200 00
-
8445 1300 00
-
8445 1900
-
8445 1900 40
-
-
-
8445 2000 00
-
8445 3000
-
8445 3000 10
-
-
-
-
-
8446 1000 10
-
-
-
8446 21
-
8446 2110 00
-
-
-
-
8446 3050
-
-
-
-
-
8447 1110 00
-
8447 1190
-
8447 1190 10
-
8447 1190 20
-
-
-
-
8447 1210 00
-
8447 1290
-
8447 1290 10
-
8447 1290 20
-
-
-
-
-
-
8447 2040 00
-
-
8447 90
-
8447 9010 00
-
8447 9050 00
-
-
-
-
-
-
8448 2050
-
8448 2050 10
-
-
-
8448 3100 00
-
-
8448 3200 10
-
-
8448 39
-
8448 3910 00
-
8448 3950 00
-
-
-
-
-
-
8448 5110 00
-
8448 5120 00
-
-
-
8448 59
-
8448 5910 00
-
-
-
-
-
8449 0010 00
-
-
-
-
8450 1100
-
8450 1100 10
-
-
8450 1100 40
-
-
-
8450 1200 00
-
-
-
8450 2000 10
-
-
8450 2000 40
-
-
-
8450 90
-
8450 9020 00
-
-
-
-
8451 1000 00
-
-
-
8451 2100 10
-
-
8451 2900
-
8451 2900 10
-
-
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8451 4000 00
-
8451 8000 00
-
8451 90
-
8451 9090
-
-
-
8452 1000
-
8452 1000 10
-
-
-
8452 21
-
8452 2110 00
-
-
8452 29
-
8452 2910 00
-
-
-
8452 3000 00
-
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-
8452 9020
-
8452 9020 10
-
-
-
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8453 8000 00
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-
8453 9010 00
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8454 1000 00
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8454 2000
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8454 2000 10
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8454 3000 10
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8454 9000 30
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8455 2100 00
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8455 3000 05
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8455 3000 35
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8455 3000 55
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8455 3000 65
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8455 3000 85
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8455 90
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8456 11
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8456 1110
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8456 1110 10
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8456 1210
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8456 1210 10
-
-
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8456 2010
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8456 2010 10
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8456 3010
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8456 3010 20
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8456 3010 50
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-
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8456 40
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8456 4010
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8456 4010 10
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-
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8456 5000 00
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8456 90
-
8456 9031 00
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-
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8457 1000
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8457 1000 05
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-
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8457 1000 15
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8457 1000 25
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8457 1000 55
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8457 3000
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8458 1100
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8458 1100 05
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-
-
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8458 1900
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8458 1900 10
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8458 1900 30
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-
-
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8458 91
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8458 9150
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8458 9910
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-
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8459 1000 00
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8459 3100
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8459 3900
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8459 3900 10
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8459 4100
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8459 4100 10
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8459 4900
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8459 4900 10
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8459 5100
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8459 5100 40
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8459 5900
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8459 5900 10
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8459 6100
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8459 6100 40
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8459 6900
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8459 7080
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8460 1200
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8460 1200 40
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8460 1901
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8460 1901 05
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-
-
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8460 2200 40
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8460 2300 40
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8460 2400
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8460 2400 05
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8460 2400 10
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8460 2400 30
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8460 2901
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8460 2901 05
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8460 2901 30
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-
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8460 3100
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8460 3100 40
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8460 3900
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8460 3900 10
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8460 3900 20
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8460 40
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8460 4040
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8460 4040 10
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8460 4080
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8460 4080 10
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8460 4080 20
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8460 90
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8460 9040
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8460 9040 10
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8460 9080
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8460 9080 10
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8460 9080 20
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-
-
-
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8461 20
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8461 2040 00
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8461 2080
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8461 30
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8461 3040
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8461 3040 20
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8461 3080
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8461 3080 20
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8461 4010
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8461 4010 10
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8461 4050
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8461 50
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8461 5040
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8461 5040 10
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8461 5080
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8461 5080 10
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8461 90
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8461 9030
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8461 9030 20
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8461 9030 60
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8461 9060
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8461 9060 10
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8462 1100
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8462 1100 10
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8462 1100 30
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8462 1100 35
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8462 1900
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8462 1900 10
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8462 1900 30
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8462 1900 35
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-
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8462 2200
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8462 2200 10
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8462 2200 20
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8462 2300
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8462 2300 10
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8462 2300 20
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8462 2400
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8462 2400 10
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8462 2400 20
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8462 2500 10
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8462 2500 20
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8462 2600 10
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8462 2900
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8462 2900 10
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8462 2900 20
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8462 2900 30
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8462 2900 40
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8462 3210
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8462 3210 40
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8462 3250
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8462 3250 10
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8462 3300
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8462 3300 40
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8462 3900
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8462 3900 10
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8462 4200
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8462 4200 40
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8462 4900
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8462 4900 10
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8462 4900 20
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8462 5100
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8462 5100 40
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8462 5900
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8462 5900 10
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8462 5900 20
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8462 61
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8462 6140
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8462 6140 30
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8462 6180
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8462 6180 30
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8462 62
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8462 6240
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8462 6240 10
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8462 6250
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8462 6250 30
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8462 63
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8462 6340
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8462 6340 10
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8462 6380
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8462 6380 10
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8462 6380 20
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8462 69
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8462 6940
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8462 6980
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8462 6980 20
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8462 90
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8462 9040
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8462 9040 10
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8462 9080
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8462 9080 20
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8463 1000 40
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8463 1000 60
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8463 2000
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8463 2000 40
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8463 2000 60
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8463 3000
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8463 3000 60
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8463 9000
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8464 1001 00
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8464 2001
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8464 2001 10
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8464 9001
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8464 9001 10
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8465 20
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8465 2050 00
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8465 9100
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8465 9100 06
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8465 9100 16
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8465 9100 27
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8465 9100 32
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8465 9100 64
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8465 9200 26
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8465 9200 51
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8465 9200 62
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8465 9300
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8465 9400
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8465 9400 05
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8465 9400 15
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8465 9400 25
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8465 9500
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8465 9500 55
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8465 9600
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8465 9902
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8466 1001
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8466 1001 10
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8466 1001 30
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8466 20
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8466 2010
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8466 2010 10
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8466 2080
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8466 2080 20
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8466 2080 40
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8466 3010 00
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-
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8466 91
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8466 92
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8466 9250
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8466 9250 10
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8466 9311 00
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8466 9330 00
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8466 9353
-
-
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-
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8466 9375 00
-
-
8466 9396 00Parts and accessories of machine tools of subheadings 8456.11, 8456.12, 8456.30, 8457.10, 8458.91, 8459.21, 8459.61 and 8461.50, of a kind used solely or principally for the manufacture of printed circuits, printed circuit assemblies, parts of heading 8517 or parts of automatic data processing machines π©
-
8466 9398
-
-
-
-
-
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8466 9465 40
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8466 9485
-
8466 9485 40
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-
-
-
-
-
-
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8467 1110
-
8467 1110 40
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8467 1150
-
8467 1150 10
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8467 1150 40
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8467 19
-
8467 1910 00
-
8467 1950
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8467 1950 60
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-
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8467 2100
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8467 2100 10
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8467 2100 30
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8467 2100 70
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8467 2200
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8467 2900
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8467 2900 10
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8467 2900 15
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8467 2900 25
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8467 2900 40
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8467 2900 70
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8467 2900 80
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8467 2900 85
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-
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8467 8100 00
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8467 89
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8467 8910 00
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8467 8950
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8467 9101 00
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8467 9200
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8467 9901
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8468 1000 00
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8468 80
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8468 90
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8470 1000 40
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8470 2100 00
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8470 5000
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8471 4101 10
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8471 6010
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8471 6010 10
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8471 6090
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8471 6090 30
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8471 70
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8471 7040 35
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8471 7050 35
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8472 1000 00
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8472 90
-
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-
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8473 3011
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8474 8000
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8474 9000 20
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8475 90
-
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8476 2100 00
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-
-
8476 8100 00
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-
-
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8477 10
-
8477 1030 00
-
8477 1040 00
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8477 1090
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8477 1090 30
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-
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8477 2000
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8477 2000 45
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8477 3000 00
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8477 90
-
8477 9025
-
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-
8477 9086
-
8477 9086 01
-
8477 9086 20
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8477 9086 30
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8477 9086 40
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8477 9086 95
-
-
-
-
-
8478 1000
-
8478 1000 10
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-
8478 9000
-
8478 9000 10
-
-
-
-
-
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8479 1000 40
-
8479 1000 60
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-
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8479 6000 00
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-
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-
8479 8983 00
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8479 8995 95
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-
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8479 90
-
8479 9041 00
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8479 9095
-
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8480 1000 00
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8480 6000
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8480 71
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8480 7110 00
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8480 7140 00
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8480 7180
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-
8480 79
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8480 7910 00
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8480 7990
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8480 7990 10
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8480 7990 90
-
-
-
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8481 1000
-
8481 1000 20
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8481 30
-
8481 3010
-
8481 3010 10
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8481 3020
-
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8481 4000 00
-
8481 80
-
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-
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8481 8030
-
8481 8050
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8481 8090
-
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8481 90
-
-
8481 9030 00
-
8481 9050 00
-
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-
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-
-
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-
-
8481 9090 81
-
-
-
-
-
-
-
8482 10
-
8482 1010
-
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-
-
8482 1050
-
8482 1050 04
-
-
8482 1050 08
-
8482 1050 12
-
-
-
8482 1050 32
-
-
8482 1050 36
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8482 1050 44
-
8482 1050 48
-
8482 1050 52
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8482 1050 56
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8482 1050 60
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-
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-
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8482 3000
-
8482 3000 40
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-
-
8482 8000 20
-
8482 8000 40
-
8482 8000 60
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-
-
8482 9100
-
-
8482 9100 10
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8482 9100 50
-
8482 9100 70
-
8482 9100 80
-
-
8482 99
-
-
8482 9905 00
-
8482 9915
-
8482 9925
-
8482 9925 20
-
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-
8482 9925 60
-
-
-
-
8482 9945 00
-
8482 9965
-
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-
8482 9965 30
-
8482 9965 60
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8483 1010 10
-
-
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8483 1030
-
8483 1030 10
-
-
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8483 1050 00
-
-
-
-
8483 2040 40
-
8483 2040 80
-
-
8483 2080
-
8483 2080 40
-
8483 2080 80
-
-
-
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8483 3040 40
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-
8483 3080
-
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8483 3080 20
-
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-
8483 3080 55
-
-
-
-
-
-
8483 4010 00
-
-
-
-
8483 4030 40
-
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8483 4050
-
8483 4050 10
-
-
-
8483 4070 00
-
-
8483 4080 00
-
-
-
-
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-
8483 6040 80
-
-
8483 90
-
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-
-
8483 9020 00
-
-
-
8483 9050 10
-
-
-
8483 9070 00
-
8483 9080
-
8483 9080 10
-
8483 9080 40
-
-
-
-
-
-
8484 2000 00
-
-
8485 1001 00
-
8485 2000 00
-
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-
8485 90
-
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-
-
-
-
-
8486 4000 10
-
-
8486 9000 00
-
-
8487 9000
-
8487 9000 40
-
-
-
-
-
-
-
8501 2020 00
-
8501 2040 00
-
8501 2050 00
-
-
-
-
-
8501 3120 00
-
8501 3140 00
-
8501 3150 00
-
-
8501 3181 00
-
-
-
-
8501 3220 00
-
-
8501 3255
-
8501 3255 20
-
-
-
8501 3261 00
-
-
-
-
8501 3320
-
8501 3320 40
-
-
8501 3330 00
-
8501 3340
-
8501 3340 40
-
-
-
8501 3361 00
-
-
8501 34
-
8501 3461 00
-
-
8501 40
-
-
8501 4020 20
-
-
-
8501 4040 20
-
-
-
8501 4050 20
-
-
8501 4060
-
8501 4060 20
-
-
-
-
-
-
8501 5120 20
-
-
8501 5140
-
8501 5140 20
-
-
8501 5150
-
8501 5150 20
-
-
8501 5160
-
8501 5160 20
-
-
-
-
8501 5240 00
-
8501 5280
-
8501 5280 20
-
-
-
8501 53
-
8501 5340
-
8501 5340 40
-
-
8501 5360 00
-
8501 5380
-
8501 5380 40
-
-
-
-
-
8501 6101 00
-
8501 6401
-
-
8501 6401 25
-
8501 6401 35
-
-
-
-
8501 7100 00
-
8501 72
-
8501 7210 00
-
8501 7220 00
-
-
-
8501 80
-
8501 8010 00
-
-
-
-
-
8502 1100 00
-
8502 1300
-
8502 1300 20
-
8502 1300 40
-
-
-
-
8502 2000 30
-
8502 2000 85
-
-
-
8502 3100 00
-
8502 3900
-
8502 3900 40
-
-
-
8502 4000 00
-
-
-
8503 0020 00
-
-
8503 0035 00
-
8503 0045 00
-
-
-
8503 0075 00
-
8503 0090 00
-
8503 0095
-
8503 0095 20
-
-
-
-
-
-
8504
-
8504 1000 00
-
-
-
-
-
-
-
8504 3140 35
-
8504 3140 65
-
-
8504 3160 00
-
-
8504 3400 00
-
-
8504 40
-
8504 4040 00
-
-
-
8504 4060 01
-
-
8504 4070
-
8504 4070 01
-
-
-
8504 4085 00
-
8504 4095
-
-
-
8504 4095 10
-
-
-
-
-
8504 50
-
8504 90
-
-
8504 9020 00
-
-
-
-
8504 9096
-
-
8504 9096 10
-
-
-
-
8504 9096 34
-
8504 9096 38
-
8504 9096 42
-
-
8504 9096 50
-
-
-
-
-
-
-
-
8505 1100
-
8505 1100 50
-
8505 1100 70
-
8505 19
-
8505 1910 00
-
8505 1920 00
-
-
-
8505 2000 00
-
8505 90
-
8505 9030 00
-
8505 9040 00
-
-
-
-
8506 1000
-
8506 1000 10
-
-
8506 30
-
8506 3010 00
-
-
8506 40
-
-
8506 4010 10
-
-
-
8506 5000
-
8506 5000 10
-
-
8506 6000
-
8506 6000 10
-
-
-
8506 8000 10
-
-
-
-
-
-
8507 1000 30
-
8507 1000 60
-
-
-
-
8507 2080
-
8507 2080 10
-
-
8507 2080 31
-
8507 2080 41
-
8507 2080 61
-
-
-
8507 5000 00
-
8507 6000
-
8507 80
-
8507 90
-
8507 9040 00
-
-
-
-
-
8508 6000 00
-
-
-
-
8509 4000 25
-
8509 4000 30
-
8509 4000 40
-
8509 80
-
8509 8010 00
-
8509 8020 00
-
8509 8050
-
8509 8050 40
-
8509 8050 45
-
-
8509 8050 50
-
-
8509 8050 70
-
-
-
-
-
8509 90
-
-
-
8510 20
-
8510 3000 00
-
8510 90
-
-
8510 9010 00
-
8510 9020 00
-
-
-
8510 9040 00
-
-
-
8511 1000 00
-
8511 3000
-
8511 3000 40
-
8511 3000 80
-
-
8511 4000 00
-
8511 5000 00
-
8511 80
-
-
8511 8020 00
-
-
-
8511 90
-
-
8511 9020 00
-
-
8511 9060
-
8511 9060 20
-
-
-
-
-
-
8512 1020 00
-
8512 1040 00
-
-
-
8512 2020
-
8512 2040
-
-
8512 3000
-
-
8512 4020 00
-
8512 4040 00
-
-
8512 90
-
8512 9020 00
-
-
8512 9040 00
-
-
8512 9070 00
-
-
-
-
8513 10
-
8513 1020 00
-
-
8513 90
-
8513 9020 00
-
-
-
-
-
8514 1100 00
-
-
-
-
-
8514 31
-
8514 32
-
8514 39
-
-
8514 90
-
8514 9040 00
-
-
-
-
-
8515 1100 00
-
-
-
8515 2100 00
-
-
-
8515 3100 00
-
8515 3900
-
-
8515 3900 20
-
-
8515 3900 60
-
-
-
8515 8000
-
8515 8000 40
-
-
8515 90
-
8515 9020 00
-
8515 9040 00
-
-
-
-
-
8516 1000 40
-
8516 1000 80
-
-
-
8516 2100 00
-
8516 2900
-
-
8516 2900 30
-
-
-
-
-
8516 3100 00
-
8516 3200
-
8516 3300 00
-
-
8516 40
-
8516 4020 00
-
-
8516 5000
-
8516 5000 30
-
8516 5000 90
-
-
-
8516 6040
-
8516 6040 60
-
-
-
8516 6040 74
-
-
8516 6040 78
-
8516 6040 82
-
-
-
-
-
-
8516 7100
-
-
8516 7100 20
-
8516 7100 40
-
-
-
-
8516 80
-
8516 90
-
-
8516 9045 00
-
-
8516 9055 00
-
8516 9080
-
8516 9080 10
-
-
-
8516 9085 00
-
-
-
-
8517 1100 00
-
8517 1300 00
-
8517 1800
-
8517 1800 10
-
-
-
-
8517 6100 00
-
-
8517 6200 20
-
-
-
-
-
8518 10
-
8518 1080
-
8518 1080 30
-
-
-
8518 2100 00
-
8518 2200 00
-
8518 29
-
-
-
8518 3010 00
-
-
-
8518 4010 00
-
-
8518 5000 00
-
8518 90
-
-
-
-
8519 30
-
8519 3010 00
-
-
-
-
-
8519 8110 00
-
-
8519 8120 00
-
-
8519 8130
-
8519 8130 10
-
-
-
8519 8141
-
8519 8141 05
-
8519 8141 20
-
-
-
8519 89
-
-
8519 8910 00
-
-
-
-
-
8521 10
-
-
8521 1030 00
-
-
-
-
-
8522 1000 00
-
8522 90
-
-
8522 9025 00
-
-
-
8522 9045 00
-
8522 9058
-
8522 9058 40
-
-
-
-
8522 9065 00
-
8522 9080
-
8522 9080 40
-
-
-
-
-
-
-
8523 2100 00
-
8523 29
-
8523 2910 00
-
-
-
-
8523 2930 00
-
8523 2940
-
8523 2940 10
-
-
-
-
8523 2950
-
8523 2950 10
-
-
-
-
8523 2970
-
8523 2970 10
-
-
-
-
-
-
-
8523 4100 00
-
8523 49
-
-
8523 4930 00
-
-
-
-
-
8523 5100 00
-
8523 5200
-
8523 5200 10
-
-
-
8523 80
-
8523 8010 00
-
-
-
-
-
8524 11
-
8524 1200 00
-
-
-
8524 91
-
8524 9200 00
-
-
-
-
8525 50
-
-
8525 5010 00
-
8525 5030
-
-
8525 5070
-
8525 5070 10
-
-
-
-
8525 6010
-
8525 6010 10
-
-
-
-
8525 89
-
-
8525 8910 00
-
-
8525 8940 00
-
8525 8950
-
8525 8950 30
-
-
-
-
-
8526 1000
-
8526 1000 20
-
-
-
8526 9100
-
8526 9100 20
-
-
8526 92
-
-
-
-
-
8527 1200 00
-
-
-
8527 1320
-
8527 1320 15
-
-
8527 1340 00
-
8527 1360
-
-
8527 19
-
8527 1950
-
8527 1950 10
-
-
-
-
-
-
8527 2125
-
8527 2140
-
-
8527 29
-
8527 2940 00
-
-
-
-
-
-
8527 9150 00
-
8527 9160
-
-
8527 9210 00
-
-
8527 99
-
8527 9915 00
-
-
-
-
-
8528 49
-
-
-
-
-
8528 4915 00
-
-
-
8528 4925 00
-
-
-
-
-
-
-
-
8528 4980 00
-
-
-
8528 59
-
-
-
-
-
8528 5915 00
-
-
-
8528 5925 00
-
8528 5933
-
8528 5933 10
-
8528 5933 50
-
-
-
-
-
-
8528 5935 00
-
-
-
8528 5945 00
-
-
-
-
8528 5960 00
-
-
-
8528 69
-
-
-
-
-
-
-
8528 6935 00
-
-
-
8528 6945 00
-
-
-
-
-
8528 6970 00
-
-
-
-
-
8528 7120 00
-
-
8528 7145 00
-
-
8528 72
-
-
-
-
8528 7212 00
-
-
-
8528 7220 00
-
-
-
-
-
-
-
-
-
8528 7262 00
-
8528 7264
-
-
8528 7264 20
-
8528 7264 30
-
8528 7264 40
-
8528 7264 60
-
-
-
-
-
8528 7268 00
-
8528 7272
-
-
8528 7272 20
-
8528 7272 30
-
8528 7272 40
-
8528 7272 60
-
-
8528 7272 90
-
-
-
-
-
-
8528 7276 00
-
-
-
8528 7284 00
-
-
-
-
8528 7300 00
-
-
-
-
-
8529 1021
-
-
8529 90
-
-
-
-
-
8529 9009 00
-
-
-
8529 9016
-
8529 9016 20
-
8529 9016 40
-
-
8529 9019
-
8529 9019 20
-
8529 9019 40
-
-
-
-
-
-
-
-
-
8529 9063 00
-
-
-
-
-
-
-
-
8529 9093
-
-
-
8529 9095
-
8529 9095 20
-
8529 9095 40
-
-
8529 9097
-
8529 9097 20
-
8529 9097 40
-
-
-
-
-
-
-
8530 1000 00
-
8530 8000 00
-
-
-
-
-
8531 1000 15
-
-
-
8531 1000 35
-
-
-
8531 2000
-
8531 2000 20
-
-
8531 80
-
8531 8015 00
-
8531 8090
-
-
8531 8090 41
-
-
-
8531 90
-
-
8531 9015 00
-
-
-
8531 9075 00
-
-
-
-
-
-
8532 2100
-
8532 2100 20
-
-
8532 2200
-
8532 2200 20
-
8532 2200 40
-
8532 2200 55
-
8532 2200 85
-
-
8532 2300
-
-
8532 2300 40
-
8532 2300 60
-
-
8532 2400
-
-
8532 2400 40
-
8532 2400 60
-
-
8532 2500
-
-
8532 2500 10
-
8532 2500 20
-
8532 2500 30
-
8532 2500 40
-
-
-
-
8532 2500 45
-
-
8532 2500 60
-
8532 2500 70
-
-
-
8532 2900
-
8532 2900 20
-
-
-
-
8532 3000 10
-
-
-
-
-
8533 1000 20
-
8533 1000 42
-
-
8533 1000 57
-
-
8533 1000 60
-
8533 1000 65
-
-
-
-
-
-
-
8533 2100 10
-
8533 2100 20
-
-
-
8533 2100 30
-
-
-
-
8533 2100 50
-
8533 2100 60
-
-
-
-
-
-
8533 4040 00
-
8533 4080
-
-
8533 90
-
-
8534 0000
-
-
-
8534 0000 20
-
-
8534 0000 50
-
-
-
8534 0000 80
-
8534 0000 85
-
-
-
-
8535 1000
-
8535 1000 20
-
-
-
8535 2100 00
-
8535 2900
-
8535 2900 20
-
-
-
8535 90
-
8535 9040 00
-
8535 9080
-
8535 9080 40
-
-
-
-
8536 1000
-
8536 1000 20
-
-
8536 2000
-
8536 2000 20
-
-
-
8536 3040 00
-
-
-
8536 4100
-
8536 4100 05
-
-
-
8536 4100 20
-
-
-
8536 4100 45
-
-
8536 4100 50
-
-
-
-
-
8536 4900
-
-
8536 4900 50
-
-
-
8536 4900 65
-
-
8536 4900 75
-
-
-
-
-
8536 50
-
8536 5040 00
-
-
8536 5070 00Electronic AC switches consisting of optically coupled input and output circuits (insulated thyristor AC switches); electronic switches, including temperature protected switches, consisting of a transistor and a logic chip (chip-on-chip technology); electromechanical snap-action switches for a current not exceeding 11 amps π©
-
8536 5090
-
-
8536 5090 20
-
8536 5090 25
-
-
-
-
8536 5090 31
-
8536 5090 32
-
-
8536 5090 35
-
-
8536 5090 40
-
-
-
-
-
8536 6100 00
-
8536 69
-
-
8536 6940 10
-
8536 6940 20
-
8536 6940 30
-
8536 6940 40
-
8536 6940 51
-
-
-
-
8536 90
-
8536 9085
-
8536 9085 10
-
8536 9085 30
-
-
-
-
-
8537 1060 00
-
-
8537 1080 00Touch-sensitive data input devices (so-called "touch screens") without display capabilities, for incorporation into apparatus having a display, which function by detecting the presence and location of a touch within the display area (such sensing may be obtained by means of resistance, electrostatic capacity, acoustic pulse recognition, infra-red lights or other touch-sensitive technology) π©
-
8537 1091
-
8537 1091 20
-
8537 1091 30
-
-
8537 1091 50
-
8537 1091 60
-
-
-
-
8537 2000
-
8537 2000 20
-
-
-
-
8538 90
-
-
8538 9060 00
-
8538 9081
-
8538 9081 20
-
-
8538 9081 40
-
-
-
-
-
8539 1000
-
-
8539 21
-
8539 2140
-
8539 2140 40
-
8539 2140 80
-
-
-
8539 2240 00
-
8539 2280
-
-
8539 2280 30
-
-
8539 2280 40
-
-
8539 2280 70
-
-
-
8539 29
-
-
8539 2910 00
-
8539 2930
-
8539 2930 20
-
-
-
-
8539 2940 00
-
-
-
-
8539 3100
-
-
8539 3100 50
-
8539 3100 60
-
-
-
8539 3200 20
-
8539 3200 40
-
-
8539 39
-
-
-
8539 5100 00
-
8539 5200
-
8539 5200 51
-
-
-
-
-
8540 11
-
-
-
8540 1110 30
-
8540 1110 40
-
8540 1110 50
-
8540 1110 55
-
8540 1110 85
-
-
-
-
-
-
8540 12
-
-
8540 1210 00
-
8540 1220 00
-
-
-
8540 1250
-
8540 1250 40
-
-
8540 1270 00
-
-
-
-
8540 6000
-
-
8540 6000 20
-
8540 6000 65
-
8540 6000 80
-
-
-
-
8540 71
-
8540 7120 00
-
-
8540 79
-
-
-
8540 8100 00
-
8540 8900
-
8540 8900 20
-
8540 8900 40
-
8540 8900 60
-
-
-
-
8540 91
-
8540 9115 00
-
8540 9120 00
-
-
8540 99
-
-
-
-
-
8541 2100
-
8541 2100 40
-
-
8541 2100 75
-
-
-
8541 2900
-
8541 2900 40
-
-
8541 2900 75
-
-
-
-
-
8541 3000 40
-
-
-
8541 4100 00
-
-
-
8541 49
-
8541 4910
-
8541 4910 10
-
-
8541 4970
-
8541 4970 40
-
-
-
8541 4980 00
-
-
-
-
-
8541 5100 00
-
8541 5900
-
8541 5900 40
-
-
-
8541 6000
-
-
8541 6000 10
-
8541 6000 20
-
8541 6000 30
-
8541 6000 50
-
8541 6000 60
-
-
-
-
-
-
-
8542 3100 35
-
8542 3100 40
-
8542 3100 45
-
-
-
8542 3100 55
-
8542 3100 60
-
-
8542 3100 70
-
8542 3200
-
-
8542 3200 02
-
8542 3200 24
-
8542 3200 28
-
8542 3200 32
-
8542 3200 36
-
-
8542 3200 41
-
-
8542 3300 01
-
8542 3900
-
8542 3900 10
-
8542 3900 20
-
-
8542 3900 30
-
8542 3900 40
-
-
-
-
-
-
8543 1000 00
-
8543 2000 00
-
-
8543 3090
-
8543 3090 40
-
-
-
8543 4000 30
-
-
8543 70
-
8543 7020 00
-
-
8543 7042 00
-
-
8543 7071 00
-
-
8543 7080 00
-
-
8543 7085 00
-
8543 7095 00Touch-sensitive data input devices (so-called "touch screens") without display capabilities, for incorporation into apparatus having a display, which function by detecting the presence and location of a touch within the display area (such sensing may be obtained by means of resistance, electrostatic capacity, acoustic pulse recognition, infra-red lights or other touch-sensitive technology) π©
-
8543 7098
-
8543 7098 10
-
-
-
-
-
8543 90
-
-
8543 9015 00
-
-
-
-
8543 9088
-
8543 9088 45
-
-
-
-
-
8544 1100
-
8544 1100 20
-
-
-
8544 2000 00
-
-
8544 42
-
8544 4210 00
-
-
8544 4220 00
-
8544 4290
-
-
-
8544 49
-
-
8544 4910 00
-
-
-
-
8544 7000 00
-
-
-
-
8545 1100
-
-
8545 1100 10
-
8545 1100 20
-
-
-
8545 19
-
8545 1920 00
-
-
-
8545 90
-
8545 9020 00
-
-
-
-
8546 2000
-
-
-
8547 10
-
8547 2000 00
-
8547 9000
-
8547 9000 10
-
-
-
-
-
-
8549 1110
-
-
-
8549 1240 00
-
-
8549 1400 00
-
-
-
Section Notes
SECTION XVI: MACHINERY AND MECHANICAL APPLIANCES;
Notes
- 1. This section does not cover:
- (a) Transmission, conveyor or elevator belts or belting, of plastics of chapter 39, or of vulcanized rubber (heading 4010), or other articles of a kind used in machinery or mechanical or electrical appliances or for other technical uses, of vulcanized rubber other than hard rubber (heading 4016);
- (b) Articles of leather or of composition leather (heading 4205) or of furskin (heading 4303), of a kind used in machinery or mechanical appliances or for other technical uses;
- (c) Bobbins, spools, cops, cones, cores, reels or similar supports, of any material (for example, chapter 39, 40, 44 or 48 or section XV);
- (d) Perforated cards for Jacquard or similar machines (for example, chapter 39 or 48 or section XV);
- (e) Transmission or conveyor belts or belting of textile material (heading 5910) or other articles of textile material for technical uses (heading 5911);
- (f) Precious or semiprecious stones (natural, synthetic or reconstructed) of headings 7102 to 7104, or articles wholly of such stones of heading 7116, except unmounted worked sapphires and diamonds for styli (heading 8522);
- (g) Parts of general use, as defined in note 2 to section XV, of base metal (section XV), or similar goods of plastics (chapter 39);
- (h) Drill pipe (heading 7304);
- (ij) Endless belts of metal wire or strip (section XV);
- (k) Articles of chapter 82 or 83;
- (l) Articles of section XVII;
- (m) Articles of chapter 90;
- (n) Clocks, watches or other articles of chapter 91;
- (o) Interchangeable tools of heading 8207 or brushes of a kind used as parts of machines (heading 9603); similar interchangeable tools are to be classified according to the constituent material of their working part (for example, in chapter 40, 42, 43, 45 or 59 or heading 6804 or 6909);
- (p) Articles of chapter 95; or
- (q) Typewriter or similar ribbons, whether or not on spools or in cartridges (classified according to their constituent material, or in heading 9612 if inked or otherwise prepared for giving impressions), or monopods, bipods, tripods and similar articles, of heading 9620.
- 2. Subject to note 1 to this section, note 1 to chapter 84 and to note 1 to chapter 85, parts of machines (not being parts of the articles of heading 8484, 8544, 8545, 8546 or 8547) are to be classified according to the following rules:
- (a) Parts which are goods included in any of the headings of chapter 84 or 85 (other than headings 8409, 8431, 8448, 8466, 8473, 8487, 8503, 8522, 8529, 8538 and 8548) are in all cases to be classified in their respective headings;
- (b) Other parts, if suitable for use solely or principally with a particular kind of machine, or with a number of machines of the same heading (including a machine of heading 8479 or 8543) are to be classified with the machines of that kind or in heading 8409, 8431, 8448, 8466, 8473, 8503, 8522, 8529 or 8538 as appropriate. However, parts which are equally suitable for use principally with the goods of headings 8517 and 8525 to 8528 are to be classified in heading 8517, and parts which are suitable for use solely or principally with the goods of heading 8524 are to be classified in heading 8529;
- (c) All other parts are to be classified in heading 8409, 8431, 8448, 8466, 8473, 8503, 8522, 8529 or 8538 as appropriate or, failing that, in heading 8487 or 8548.
- 3. Unless the context otherwise requires, composite machines consisting of two or more machines fitted together to form a whole and other machines designed for the purpose of performing two or more complementary or alternative functions are to be classified as if consisting only of that component or as being that machine which performs the principal function.
- 4. Where a machine (including a combination of machines) consists of individual components (whether separate or interconnected by piping, by transmission devices, by electric cables or by other devices) intended to contribute together to a clearly defined function covered by one of the headings in chapter 84 or chapter 85, then the whole falls to be classified in the heading appropriate to that function.
- 5. For the purposes of these notes, the expression "machine" means any machine, machinery, plant, equipment, apparatus or appliance cited in the headings of chapter 84 or 85.
- 6.
- (A) Throughout the tariff schedule, βelectrical and electronic waste and scrapβ means electrical and electronic assemblies, printed circuit boards, and electrical or electronic articles that:
- (a) have been rendered unusable for their original purposes by breakage, cutting-up or other processes or are economically unsuitable for repair, refurbishment or renovation to render them fit for their original purposes; and
- (b) are packaged or shipped in a manner not intended to protect individual articles from damage during transportation, loading and unloading operations.
- (B) Mixed consignments of βelectrical and electronic waste and scrapβ and other waste and scrap are to be classified in heading 8549.
- (C) This section does not cover municipal waste, as defined in note 4 to chapter 38.
- (A) Throughout the tariff schedule, βelectrical and electronic waste and scrapβ means electrical and electronic assemblies, printed circuit boards, and electrical or electronic articles that:
Additional U.S. Note
- 1. For the purposes of this section, the term "printed circuit assembly"means goods consisting of one or more printed circuits of heading 8534 with one or more active elements assembled thereon, with or without passive elements. For the purposes of this note,"active elements" means diodes, transistors and similar semiconductor devices, whether or not photosensitive, of heading 8541, and integrated circuits of heading 8542.
Statistical Note
- 1. Provisions for semiconductor manufacturing and testing machines and apparatus cover products for the growth and processing of semiconductor materials, such as silicon and gallium arsenide, the processing of such materials into semiconductor devices and the testing of such devices (in general the testing equipment, as well as some of the processing equipment, is classified in chapter 90). More specifically the goods include the following:
- (a) Wafer manufacturing equipment:
- (i) Crystal growers & pullers - used to produce extremely pure monocrystalline semiconductor boules from which wafers can be sliced. Most common methods employed in these crystal growers and pullers are the Czochralski and float zone methods.
- (ii) Wafer preparation equipment:
- (A) Crystal grinders - used to grind the crystal boule to precise diameter required for wafers and to grind the flats on the boule to indicate the conductivity type and resistivity of the crystal.
- (B) Wafer slicing saws - used to slice wafers from a boule of monocrystalline semiconductor material.
- (C) Wafer grinders, lappers and polishers - used to prepare the semiconductor wafer for the fabrication process. This involves bringing the wafer within dimensional tolerances. Especially critical is the flatness of its surface.
- (b) Mask fabrication and repair equipment:
- (i) Fabrication equipment - used to transfer design patterns to a mask or reticle, this equipment generally utilizes optical, electron beam or X-rays to write circuit patterns on photoresist coated substrates. After development, these substrates become the mask or reticle for wafer fabrication.
- (ii) Repair equipment - this equipment generally utilizes focused ion beams or laser beams. They are used directly on the mask or reticle to remove chrome.
- (c) Wafer fabrication equipment:
- (i) Film formation equipment - used to apply or produce various films on the surface of the wafer during the fabrication process. These films serve as conductors, insulators and semiconductors on the finished device. They may include oxides and nitrides of the substrate surface, metals, and epitaxial layers. The processes and equipments listed below are not necessarily limited to the generation of a particular type of film.
- (A) Oxidation furnaces - used to form a "film" of oxide on the wafer. The oxide is formed by the chemical reaction of the top molecular layers of the wafer with the applied oxygen or steam under heat.
- (B) Chemical Vapor Deposition (CVD) equipment - used to deposit various types of films which are obtained by combining the appropriate gases in a reactant chamber at elevated temperatures. This constitutes a thermochemical vapor-phase reaction. Operations may take place at atmospheric or low pressure (LPCVD) and may use plasma enhancement (PECVD).
- (C) Physical Vapor Deposition (PVD) equipment - used to deposit various types of films which are obtained by vaporizing a solid.
- (1) Evaporation equipment - in which the film is generated by heating the source material.
- (2) Sputtering equipment - in which the film is generated by bombarding the source material (target) with ions.
- (D) Molecular Beam Epitaxy (MBE) equipment - used to grow epitaxial layers on a heated monocrystalline substrate in an ultrahigh vacuum using beams of molecules. The process is similar to PVD.
- (ii) Doping equipment - which is used to introduce dopants into the wafer surface in order to modify the conductivity or other characteristics of a semiconductor layer:
- (A) Thermal diffusion equipment - in which the dopants are introduced into the surface of the wafer by the application of gases under high temperatures.
- (B) Ion Implantation - in which the dopants are "driven" into the crystal lattice structure of the surface of the wafer in the form of a beam of accelerated ions.
- (C) Annealing furnaces - which are used to repair the crystal lattice structures of the wafer damaged by ion implantation.
- (iii) Etching and stripping equipment - used for etching or cleaning surfaces of the wafers.
- (A) Wet etching equipment - in which chemical etching materials are applied by spraying or immersion. Spray etchers provide more uniform results than bath etchers, since they perform the operation on one wafer at a time.
- (B) Dry plasma etching - in which etching materials are presented as gases within a plasma energy field, providing an anisotropic etch profile.
- (C) Ion beam milling equipment - in which ionized gas atoms are accelerated toward the wafer surface. The impact results in the top layer being physically removed from the surface.
- (D) Strippers or ashers - using techniques similar to etching, this apparatus removes the spent photoresist from the surface of the wafer after it has served its purpose as a "stencil". This equipment is also used for removal of nitrides, oxides, and polysilicon, with an isotropic etch profile.
- (iv) Lithography equipment - used to transfer the circuit designs to the photoresist coated surface of the semiconductor wafer.
- (A) Equipment for coating wafers with photoresist - these include the photoresist spinners which are used to apply liquid photoresist evenly over the surface of the wafer.
- (B) Equipment for exposing the photoresist coated wafer with the circuit design (or a part thereof):
- (1) Using a mask or reticle and exposing the photoresist to light (generally ultraviolet) or, in some instances, X-rays:
- (a) Contact printers - where the mask or reticle is in contact with the wafer during exposure.
- (b) Proximity aligners - similar to contact aligners except actual contact does not take place between the mask or reticle and the wafer.
- (c) Scanning aligners - which use projection techniques to expose a continuously moving slit across the mask and wafer.
- (d) Step and repeat aligners - which use projection techniques to expose the wafer a portion at a time. Exposure can be by reduction from the mask to the wafer or 1:1. Enhancements include the use of an excimer laser.
- (2) Direct write on wafer equipment - these apparatus operate with no mask or reticle. They use a computer controlled "writing beam" (such as an electron beam (E-beam), ion beam or laser) to "draw" the circuit design directly on the photoresist coated wafer.
- (1) Using a mask or reticle and exposing the photoresist to light (generally ultraviolet) or, in some instances, X-rays:
- (C) Equipment for developing exposed wafers - these include chemical baths similar to those used in photographic laboratory applications.
- (i) Film formation equipment - used to apply or produce various films on the surface of the wafer during the fabrication process. These films serve as conductors, insulators and semiconductors on the finished device. They may include oxides and nitrides of the substrate surface, metals, and epitaxial layers. The processes and equipments listed below are not necessarily limited to the generation of a particular type of film.
- (d) Assembly equipment:
- (i) Dicing equipment - these include sawing machines and scribing machines (including laser scribers) and dicing accessories such as wafer breaking equipment.
- (ii) Die bonding equipment - which installs the die to the package by soldering or gluing
- (iii) Wire bonding equipment - used for attaching thin wires or tapes (usually of gold, aluminum or copper) from the die bonding pads to the corresponding pads on the package.
- (iv) Packaging equipment - which are used to encapsulate or package a semiconductor device. They include sealing furnaces, lid welders, plastic encapsulation presses, lead trim and form equipment, package deflashers, and tin dip and solder plate equipment.
- (e) Testing and inspection equipment:
- (i) Optical inspection equipment - These include equipment that "examines" portions of the wafer surface and compares them either to a standard pattern or to other portions of the wafer surface.
- (ii) Electrical testing equipment - These include computer controlled systems that test the functions and electrical specifications of semiconductor devices through the application and detection of electrical signals or patterns. Testing is performed on both unencapsulated dice and packaged integrated circuits.
- (a) Wafer manufacturing equipment: